Assignee
CHANDRASHEKAR ANAND
US·8 granted patents·798 citations·filing 2008–2012
Top patents by PatentIndex Score
8 records- 0198US8435894B2Depositing tungsten into high aspect ratio featuresCHANDRASHEKAR ANAND·Filed 2012·Granted May 7, 2013·314 cites·13 claims
- 0298US8153520B1Thinning tungsten layer after through silicon via fillingCHANDRASHEKAR ANAND·Filed 2009·Granted Apr 10, 2012·218 cites·22 claims
- 0397US8124531B2Depositing tungsten into high aspect ratio featuresCHANDRASHEKAR ANAND·Filed 2011·Granted Feb 28, 2012·64 cites·20 claims
- 0496US9034768B2Depositing tungsten into high aspect ratio featuresCHANDRASHEKAR ANAND·Filed 2010·Granted May 19, 2015·32 cites·21 claims
- 0596US8409987B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2011·Granted Apr 2, 2013·34 cites·19 claims
- 0696US8129270B1Method for depositing tungsten film having low resistivity, low roughness and high reflectivityCHANDRASHEKAR ANAND·Filed 2008·Granted Mar 6, 2012·37 cites·17 claims
- 0796US8058170B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2009·Granted Nov 15, 2011·83 cites·21 claims
- 0895US8501620B2Method for depositing tungsten film having low resistivity, low roughness and high reflectivityCHANDRASHEKAR ANAND·Filed 2012·Granted Aug 6, 2013·16 cites·20 claims
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