Assignee
CHANG CHUN-LIN
TW·3 granted patents·40 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0194US8404572B2Multi-zone temperature control for semiconductor waferCHANG CHUN-LIN·Filed 2009·Granted Mar 26, 2013·40 cites·20 claims
- 0252US8581204B2Apparatus for monitoring ion implantationCHANG CHUN-LIN·Filed 2011·Granted Nov 12, 2013·0 cites·20 claims
- 0347US9053907B2System and method of ion neutralization with multiple-zoned plasma flood gunCHANG CHUN-LIN·Filed 2012·Granted Jun 9, 2015·0 cites·18 claims
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