Assignee
CHANG DIAZ FRANKLIN
US·1 granted patent·2 pending applications·16 citations·filing 2008–2016
Top patents by PatentIndex Score
3 records- 0171US8593064B2Plasma source improved with an RF coupling systemCHANG DIAZ FRANKLIN·Filed 2008·Granted Nov 26, 2013·16 cites·21 claims
- 0243US2016205759A1Plasma source with an rf coupling system and method of operating thereofCHANG DIAZ FRANKLIN·Filed 2016·Application pending·0 cites
- 0341US2014217893A1Plasma sourceCHANG DIAZ FRANKLIN·Filed 2013·Application pending·0 cites
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