Assignee
CHANG MEI
US·4 granted patents·532 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0198US8633115B2Methods for atomic layer etchingCHANG MEI·Filed 2011·Granted Jan 21, 2014·522 cites·11 claims
- 0284US8268684B2Method and apparatus for trench and via profile modificationCHANG MEI·Filed 2011·Granted Sep 18, 2012·5 cites·20 claims
- 0373US8642473B2Methods for contact cleanCHANG MEI·Filed 2012·Granted Feb 4, 2014·4 cites·23 claims
- 0462US7658970B2Noble metal layer formation for copper film depositionCHANG MEI·Filed 2008·Granted Feb 9, 2010·1 cites·19 claims
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