Assignee
CHANG SHENGWU
US·2 granted patents·1 pending application·3 citations·filing 2005–2011
Top patents by PatentIndex Score
3 records- 0166US9012337B2Platen controlCHANG SHENGWU·Filed 2011·Granted Apr 21, 2015·2 cites·14 claims
- 0259US8330125B2Ion beam tuningCHANG SHENGWU·Filed 2010·Granted Dec 11, 2012·1 cites·13 claims
- 0342US2006169922A1Ion implant ion beam parallelism and direction integrity determination and adjustingCHANG SHENGWU·Filed 2005·Application pending·0 cites
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