Assignee
CHANG SHOU-SUNG
US·3 granted patents·36 citations·filing 2008–2012
Top patents by PatentIndex Score
3 records- 0195US8221193B2Closed loop control of pad profile based on metrology feedbackCHANG SHOU-SUNG·Filed 2008·Granted Jul 17, 2012·29 cites·20 claims
- 0285US9061394B2Systems and methods for substrate polishing end point detection using improved friction measurementCHANG SHOU-SUNG·Filed 2012·Granted Jun 23, 2015·5 cites·11 claims
- 0373US9862070B2Systems and methods for substrate polishing end point detection using improved friction measurementCHANG SHOU-SUNG·Filed 2012·Granted Jan 9, 2018·2 cites·14 claims
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