Assignee
CHAPMAN INSTR INC
US·4 granted patents·87 citations·filing 1989–2006
Technology mixG01B4
Top patents by PatentIndex Score
4 records- 0181US5017012AViewing system for surface profilerCHAPMAN INSTR INC·Filed 1989·Granted May 21, 1991·46 cites·24 claims
- 0264US7283256B2Method and apparatus for measuring wafer thicknessCHAPMAN INSTR INC·Filed 2006·Granted Oct 16, 2007·7 cites·6 claims
- 0363US5986753AWafer holding and orienting fixture for optical profilometryCHAPMAN INSTR INC·Filed 1998·Granted Nov 16, 1999·30 cites·14 claims
- 0441US7280232B2Method and apparatus for measuring wafer thicknessCHAPMAN INSTR INC·Filed 2004·Granted Oct 9, 2007·4 cites·11 claims
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