Assignee
CHEN AIHUA
CN·4 granted patents·25 citations·filing 2006–2024
Top patents by PatentIndex Score
4 records- 0190US8336488B2Multi-station plasma reactor with multiple plasma regionsCHEN AIHUA·Filed 2007·Granted Dec 25, 2012·11 cites·28 claims
- 0284US8715418B2Semiconductor processing system; a semiconductor processing chamber; and a method for loading, unloading and exchanging semiconductor work pieces from a semiconductor processing chamberCHEN AIHUA·Filed 2006·Granted May 6, 2014·10 cites·17 claims
- 0368USD1025430SSolar lampCHEN AIHUA·Filed 2024·Granted Apr 30, 2024·2 cites·1 claims
- 0468US9947562B2Method and apparatus for processing semiconductor work piecesCHEN AIHUA·Filed 2011·Granted Apr 17, 2018·2 cites·9 claims
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