Assignee
CHEN CHIEN-HUEI ADAM
US·3 granted patents·45 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0191US8135204B1Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipeCHEN CHIEN-HUEI ADAM·Filed 2007·Granted Mar 13, 2012·33 cites·26 claims
- 0280US8139844B2Methods and systems for determining a defect criticality index for defects on wafersCHEN CHIEN-HUEI ADAM·Filed 2008·Granted Mar 20, 2012·11 cites·19 claims
- 0360US8213705B2Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a waferCHEN CHIEN-HUEI ADAM·Filed 2011·Granted Jul 3, 2012·1 cites·20 claims
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