Assignee
CHEN HAIGUANG
US·5 granted patents·14 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0180US8494802B2Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a waferCHEN HAIGUANG·Filed 2009·Granted Jul 23, 2013·8 cites·19 claims
- 0273US9031810B2Methods and systems of object based metrology for advanced wafer surface nanotopographyCHEN HAIGUANG·Filed 2011·Granted May 12, 2015·3 cites·13 claims
- 0363US8630479B2Methods and systems for improved localized feature quantification in surface metrology toolsCHEN HAIGUANG·Filed 2011·Granted Jan 14, 2014·2 cites·19 claims
- 0461US10330608B2Systems and methods for wafer surface feature detection, classification and quantification with wafer geometry metrology toolsCHEN HAIGUANG·Filed 2012·Granted Jun 25, 2019·1 cites·25 claims
- 0541US8594975B2Systems and methods for wafer edge feature detection and quantificationCHEN HAIGUANG·Filed 2011·Granted Nov 26, 2013·0 cites·14 claims
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