Assignee
CHEN LI-JUI
TW·3 granted patents·19 citations·filing 2007–2012
Top patents by PatentIndex Score
3 records- 0190US8264662B2In-line particle detection for immersion lithographyCHEN LI-JUI·Filed 2007·Granted Sep 11, 2012·17 cites·16 claims
- 0266US9360778B2System and method for lithography patterningCHEN LI-JUI·Filed 2012·Granted Jun 7, 2016·2 cites·20 claims
- 0352US9389520B2System and method for lithography with leveling sensorCHEN LI-JUI·Filed 2012·Granted Jul 12, 2016·0 cites·20 claims
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