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CHEN LU

US7 patents

Top patents by PatentIndex Score

US8605275B2Dec 10, 2013

Detecting defects on a wafer

CHEN LU22 citations92
US8223327B2Jul 17, 2012

Systems and methods for detecting defects on a wafer

CHEN LU24 citations91
US9188073B2Nov 17, 2015

Method and device for diagnosing deviations in a single cylinder lambda control

CHEN LU11 citations83
US8467047B2Jun 18, 2013

Systems and methods for detecting defects on a wafer

CHEN LU5 citations83
US6965280B2Nov 15, 2005

Three way power splitter

CHEN LU9 citations74
US8882870B2Nov 11, 2014

Coated tool

CHEN LU0 citations52
US9544335B2Jan 10, 2017

Method and system for local calling via webpage

CHEN LU0 citations42