Assignee

CHEN PEI-SHIANG

TW·2 granted patents·59 citations·filing 2012–2012

Technology mixG03F2 H01J2 B82Y1 G06F1 H10P1 Y10S1

Top patents by PatentIndex Score

2 records

0195US8835082B2Method and system for E-beam lithography with multi-exposureCHEN PEI-SHIANG·Filed 2012·Granted Sep 16, 2014·28 cites·20 claims
0295US8609308B1Smart subfield method for E-beam lithographyCHEN PEI-SHIANG·Filed 2012·Granted Dec 17, 2013·31 cites·20 claims

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