Assignee
CHEN SHYNG-TSONG
US·3 granted patents·17 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0183US8415248B2Self-aligned dual damascene BEOL structures with patternable low-k material and methods of forming sameCHEN SHYNG-TSONG·Filed 2012·Granted Apr 9, 2013·6 cites·16 claims
- 0282US8519540B2Self-aligned dual damascene BEOL structures with patternable low- K material and methods of forming sameCHEN SHYNG-TSONG·Filed 2009·Granted Aug 27, 2013·10 cites·17 claims
- 0360US8716133B2Three photomask sidewall image transfer methodCHEN SHYNG-TSONG·Filed 2012·Granted May 6, 2014·1 cites·20 claims
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