Assignee
CHEN YANFENG
US2 patents
Top patents by PatentIndex Score
US9018100B2Apr 28, 2015
Damascene process using PVD sputter carbon film as CMP stop layer for forming a magnetic recording head
CHEN YANFENG2 citations57
US8871048B2Oct 28, 2014
Flexible nanoimprint mold, method for fabricating the same, and mold usage on planar and curved substrate
CHEN YANFENG3 citations57