Assignee
CHENG NAI-HAN
TW·4 granted patents·7 citations·filing 2009–2011
Top patents by PatentIndex Score
4 records- 0185US8709528B2Wafer processing method and system using multi-zone chuckCHENG NAI-HAN·Filed 2011·Granted Apr 29, 2014·6 cites·20 claims
- 0261US8241924B2Method and system for controlling an implantation processCHENG NAI-HAN·Filed 2009·Granted Aug 14, 2012·1 cites·13 claims
- 0346US8592785B2Multi-ion beam implantation apparatus and methodCHENG NAI-HAN·Filed 2011·Granted Nov 26, 2013·0 cites·20 claims
- 0444US9031684B2Multi-factor advanced process control method and system for integrated circuit fabricationCHENG NAI-HAN·Filed 2011·Granted May 12, 2015·0 cites·16 claims
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