Assignee
CHESHIRE ALAN
GB·2 granted patents·1 pending application·204 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0192US8937017B2Method and apparatus for etchingCHESHIRE ALAN·Filed 2010·Granted Jan 20, 2015·101 cites·9 claims
- 0292US8298959B2Method and apparatus for etchingCHESHIRE ALAN·Filed 2010·Granted Oct 30, 2012·103 cites·20 claims
- 0343US2012208300A1Etch processing chamberCHESHIRE ALAN·Filed 2012·Application pending·0 cites
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