Assignee
CHI KYEONG-KOO
US·4 granted patents·1 pending application·11 citations·filing 2006–2010
Top patents by PatentIndex Score
5 records- 0178US8158524B2Line width roughness control with arc layer openCHI KYEONG-KOO·Filed 2008·Granted Apr 17, 2012·6 cites·13 claims
- 0272US8501627B2Profile control in dielectric etchCHI KYEONG-KOO·Filed 2008·Granted Aug 6, 2013·4 cites·10 claims
- 0363US8906194B2Ultra-high aspect ratio dielectric etchCHI KYEONG-KOO·Filed 2010·Granted Dec 9, 2014·1 cites·14 claims
- 0450US2006205190A1Semiconductor etching apparatus and method of etching semiconductor devices using sameCHI KYEONG-KOO·Filed 2006·Application pending·0 cites
- 0549US8470715B2CD bias loading control with ARC layer openCHI KYEONG-KOO·Filed 2008·Granted Jun 25, 2013·0 cites·11 claims
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