Assignee
CHILD KENT RILEY
US·2 granted patents·5 pending applications·1 citations·filing 2007–2011
Top patents by PatentIndex Score
7 records- 0156US8816258B2Segmented susceptor for temperature uniformity correction and optimization in an inductive heating systemCHILD KENT RILEY·Filed 2011·Granted Aug 26, 2014·1 cites·14 claims
- 0243US2012285819A1Combinatorial and Full Substrate Sputter Deposition Tool and MethodCHILD KENT RILEY·Filed 2011·Application pending·0 cites
- 0343US2013153415A1Combinatorial RF Biasing for Selectable Spot-Site IsolationCHILD KENT RILEY·Filed 2011·Application pending·0 cites
- 0442US9018570B2Combinatorial heating of substrates by an inductive process and combinatorial independent heatingCHILD KENT RILEY·Filed 2011·Granted Apr 28, 2015·0 cites·14 claims
- 0537US2008268651A1Catch-cup to diverter alignment leveling jigCHILD KENT RILEY·Filed 2007·Application pending·0 cites
- 0634US2013153054A1Combinatorial Processing ToolCHILD KENT RILEY·Filed 2011·Application pending·0 cites
- 0733US2013130509A1Combinatorial spot rastering for film uniformity and film tuning in sputtered filmsCHILD KENT RILEY·Filed 2011·Application pending·0 cites
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