Assignee
CHINA ELECTRONICS TECH GROUP CORPORATION NO 55 RESEARCH INSTITUTE
CN·1 granted patent·1 pending application·0 citations·filing 2016–2017
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2 records- 0132US11011472B2Self-aligned register structure for base polysilicon and preparation method thereofCHINA ELECTRONICS TECH GROUP CORPORATION NO 55 RESEARCH INSTITUTE·Filed 2017·Granted May 18, 2021·0 cites·10 claims
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