Assignee
CHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS
CN·9 granted patents·1 citations·filing 2013–2020
Top patents by PatentIndex Score
9 records- 0164US9829504B2Tri-axial MEMS accelerometerCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2014·Granted Nov 28, 2017·1 cites·15 claims
- 0258US11226251B2Method of making a dual-cavity pressure sensor dieCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2020·Granted Jan 18, 2022·0 cites·8 claims
- 0358US10392247B2Fabrication process for a symmetrical MEMS accelerometerCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2017·Granted Aug 27, 2019·0 cites·5 claims
- 0451US10612926B2MEMS anti-phase vibratory gyroscopeCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2017·Granted Apr 7, 2020·0 cites·9 claims
- 0551US9828242B2Accelerometer and its fabrication techniqueCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2016·Granted Nov 28, 2017·0 cites·7 claims
- 0650US9170271B2Accelerometer and its fabrication techniqueCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2013·Granted Oct 27, 2015·0 cites·14 claims
- 0749US10900995B2Tri-axial MEMS accelerometerCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2017·Granted Jan 26, 2021·0 cites·7 claims
- 0848US10775248B2MEMS strain gauge sensor and manufacturing methodCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2016·Granted Sep 15, 2020·0 cites·20 claims
- 0943US11255740B2Pressure gauge chip and manufacturing process thereofCHINESE ACADEMY OF SCIENCES INST OF GEOLOGY AND GEOPHYSICS·Filed 2017·Granted Feb 22, 2022·0 cites·17 claims
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