Assignee
CHINO TAKASHI
JP2 patents
Top patents by PatentIndex Score
US8581153B2Nov 12, 2013
Method of detecting abnormal placement of substrate, substrate processing method, computer-readable storage medium, and substrate processing apparatus
CHINO TAKASHI1 citations41
US8980366B2Mar 17, 2015
Conditioning method, computer readable storage medium and substrate processing apparatus
CHINO TAKASHI0 citations27