Assignee
CHOI DONGSUB
KR4 patents
Top patents by PatentIndex Score
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Method and system for detecting and correcting problematic advanced process control parameters
CHOI DONGSUB14 citations83
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Overlay target geometry for measuring multiple pitches
CHOI DONGSUB15 citations82
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Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability
CHOI DONGSUB4 citations71
US8655469B2Feb 18, 2014
Advanced process control optimization
CHOI DONGSUB4 citations71