Assignee
CHOI JIN
KR·16 granted patents·31 citations·filing 2010–2015
Top patents by PatentIndex Score
16 records- 0193US9671686B2Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefromCHOI JIN·Filed 2015·Granted Jun 6, 2017·8 cites·7 claims
- 0280US8458624B2Method for manufacturing semiconductor device by correcting overlapping shots based on a radiation influenced patternCHOI JIN·Filed 2011·Granted Jun 4, 2013·7 cites·9 claims
- 0380US8187778B2Method for correcting a position error of lithography apparatusCHOI JIN·Filed 2010·Granted May 29, 2012·3 cites·15 claims
- 0477US8566541B2Storage system storing electronic modules applied to electronic objects common to several computers, and storage control method for the sameCHOI JIN·Filed 2010·Granted Oct 22, 2013·5 cites·11 claims
- 0567US8475980B2Methods of forming semiconductor devices using photolithographic shot groupingCHOI JIN·Filed 2011·Granted Jul 2, 2013·1 cites·20 claims
- 0663US8563951B2Exposure systems for integrated circuit fabricationCHOI JIN·Filed 2012·Granted Oct 22, 2013·1 cites·15 claims
- 0761US8697317B2Exposure apparatus for forming a reticle and method of forming a reticle using the sameCHOI JIN·Filed 2012·Granted Apr 15, 2014·1 cites·15 claims
- 0854US8524426B2Method of manufacturing a photomaskCHOI JIN·Filed 2012·Granted Sep 3, 2013·0 cites·10 claims
- 0948US8673522B2Method for manufacturing photomask and photomask manufactured using the sameCHOI JIN·Filed 2012·Granted Mar 18, 2014·0 cites·14 claims
- 1047US9017904B2Methods of providing photolithography patterns using feature parametersCHOI JIN·Filed 2013·Granted Apr 28, 2015·0 cites·25 claims
- 1147US8329381B2Pattern forming methodCHOI JIN·Filed 2012·Granted Dec 11, 2012·0 cites·20 claims
- 1246US8817234B2Optical device and exposure apparatus including the sameCHOI JIN·Filed 2011·Granted Aug 26, 2014·0 cites·19 claims
- 1343US8465884B2Electron beam depicting pattern design, photomask, methods of depicting and fabricating photomask, and method of fabricating semiconductor device using the sameCHOI JIN·Filed 2010·Granted Jun 18, 2013·0 cites·14 claims
- 1441US8609305B2Methods of forming a photolithography reticleCHOI JIN·Filed 2012·Granted Dec 17, 2013·0 cites·14 claims
- 1540USD698948SUtility pylonCHOI JIN·Filed 2011·Granted Feb 4, 2014·4 cites·1 claims
- 1631USD663440SUtility pylonCHOI JIN·Filed 2011·Granted Jul 10, 2012·1 cites·1 claims
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