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CHU HANYOU
US3 patents
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US8560270B2Oct 15, 2013
Rational approximation and continued-fraction approximation approaches for computation efficiency of diffraction signals
CHU HANYOU3 citations61
US8762100B1Jun 24, 2014
Numerical aperture integration for optical critical dimension (OCD) metrology
CHU HANYOU2 citations60
US8670948B2Mar 11, 2014
Numerical aperture integration for optical critical dimension (OCD) metrology
CHU HANYOU2 citations59