Assignee
CIGAL JEAN-CHARLES
DE·0 granted patents·3 pending applications·0 citations·filing 2011–2011
Top patents by PatentIndex Score
3 records- 0140US2013239988A1Deposition chamber cleaning using in situ activation of molecular fluorineCIGAL JEAN-CHARLES·Filed 2011·Application pending·0 cites
- 0237US2013220364A1Reactor box chamber cleaning using molecular fluorineCIGAL JEAN-CHARLES·Filed 2011·Application pending·0 cites
- 0331US2013276820A1Chemical vapor deposition chamber cleaning with molecular fluorineCIGAL JEAN-CHARLES·Filed 2011·Application pending·0 cites
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