Assignee
CLAUSS WILFRIED
DE4 patents
Top patents by PatentIndex Score
US9263161B2Feb 16, 2016
Optical arrangement for EUV lithography and method for configuring such an optical arrangement
CLAUSS WILFRIED2 citations59
US8711332B2Apr 29, 2014
Mirror elements for EUV lithography and production methods therefor
CLAUSS WILFRIED0 citations48
US8570488B2Oct 29, 2013
Transmitting optical element and objective for a microlithographic projection exposure apparatus
CLAUSS WILFRIED0 citations48
US8163667B2Apr 24, 2012
Transmitting optical element with low foreign-element contamination
CLAUSS WILFRIED1 citations48