Assignee
CLEAN FACTOMATION INC
KR3 patents
Top patents by PatentIndex Score
US10796937B2Oct 6, 2020
Equipment front end module
CLEAN FACTOMATION INC2 citations65
US11380567B2Jul 5, 2022
Wafer purging-type shelf assembly and buffer module having the same
CLEAN FACTOMATION INC1 citations54
US9550219B2Jan 24, 2017
Apparatus of inhalation type for stocking wafer at ceiling and inhaling type wafer stocking system having the same
CLEAN FACTOMATION INC1 citations42