Assignee
COLLINS KENNETH S
US4 patents
Top patents by PatentIndex Score
US8652297B2Feb 18, 2014
Symmetric VHF plasma power coupler with active uniformity steering
COLLINS KENNETH S7 citations83
US8076247B2Dec 13, 2011
Plasma process uniformity across a wafer by controlling RF phase between opposing electrodes
COLLINS KENNETH S11 citations83
US8080479B2Dec 20, 2011
Plasma process uniformity across a wafer by controlling a variable frequency coupled to a harmonic resonator
COLLINS KENNETH S6 citations73
US8414736B2Apr 9, 2013
Plasma reactor with tiltable overhead RF inductive source
COLLINS KENNETH S4 citations62