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COMMW SCIENT CORP
US5 patents
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US5616179AApr 1, 1997
Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films
COMMW SCIENT CORP98 citations94
US4403567ASep 13, 1983
Workpiece holder
COMMW SCIENT CORP70 citations91
US4187801AFeb 12, 1980
Method and apparatus for transporting workpieces
COMMW SCIENT CORP60 citations90
US5177398AJan 5, 1993
Grid assembly for ion beam sources and method therefor
COMMW SCIENT CORP17 citations65
US5256930AOct 26, 1993
Cooled plasma source
COMMW SCIENT CORP2 citations62