Assignee

CONSEJO SUPERIOR DE INVESTIG CIENTIFICAS (CSIC) [ES/ES]

ES·1 granted patent·0 citations·filing 2013–2013

Technology mixB81C1 B82B1 G01B1 G01H1 G01N1 G01Q1

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0127US9829427B2Method and system for characterization of nano- and micromechanical structuresCONSEJO SUPERIOR DE INVESTIG CIENTIFICAS (CSIC) [ES/ES]·Filed 2013·Granted Nov 28, 2017·0 cites·5 claims

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