Assignee
CONVAC GMBH
DE3 patents
Top patents by PatentIndex Score
US5083364AJan 28, 1992
System for manufacturing semiconductor substrates
CONVAC GMBH129 citations91
US4979464ADec 25, 1990
Apparatus for treating wafers in the manufacture of semiconductor elements
CONVAC GMBH59 citations89
US5069155ADec 3, 1991
Apparatus for in-line lacquering of compact disks
CONVAC GMBH12 citations67