Assignee
COON DEREK
US·4 granted patents·1 pending application·10 citations·filing 2007–2011
Top patents by PatentIndex Score
5 records- 0189US8497973B2Immersion lithography fluid control system regulating gas velocity based on contact angleCOON DEREK·Filed 2007·Granted Jul 30, 2013·7 cites·16 claims
- 0274US8102501B2Immersion lithography fluid control system using an electric or magnetic field generatorCOON DEREK·Filed 2007·Granted Jan 24, 2012·2 cites·44 claims
- 0368US8797500B2Immersion lithography fluid control system changing flow velocity of gas outlets based on motion of a surfaceCOON DEREK·Filed 2008·Granted Aug 5, 2014·1 cites·22 claims
- 0459US9618852B2Immersion lithography fluid control system regulating flow velocity of gas based on position of gas outletsCOON DEREK·Filed 2008·Granted Apr 11, 2017·0 cites·54 claims
- 0540US2012257179A1Apparatus and methods to recover liquid in immersion lithographyCOON DEREK·Filed 2011·Application pending·0 cites
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