Assignee
COTE MICHEL L
US·2 granted patents·0 citations·filing 2009–2009
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0158US8566757B2Layout of phase shifting photolithographic masks with refined shifter shapesCOTE MICHEL L·Filed 2009·Granted Oct 22, 2013·0 cites·3 claims
- 0255US8977989B2Handling of flat data for phase processing including growing shapes within bins to identify clustersCOTE MICHEL L·Filed 2009·Granted Mar 10, 2015·0 cites·16 claims
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