Assignee
CUTEK RES INC
US·6 granted patents·267 citations·filing 1998–2000
Top patents by PatentIndex Score
6 records- 0190US6241825B1Compliant wafer chuckCUTEK RES INC·Filed 1999·Granted Jun 5, 2001·104 cites·16 claims
- 0288US6179982B1Introducing and reclaiming liquid in a wafer processing chamberCUTEK RES INC·Filed 1998·Granted Jan 30, 2001·62 cites·19 claims
- 0385US6187152B1Multiple station processing chamber and method for depositing and/or removing material on a substrateCUTEK RES INC·Filed 1998·Granted Feb 13, 2001·67 cites·22 claims
- 0479US6365025B1Method for depositing and/or removing material on a substrateCUTEK RES INC·Filed 2000·Granted Apr 2, 2002·20 cites·9 claims
- 0540US6454864B2Two-piece chuckCUTEK RES INC·Filed 1999·Granted Sep 24, 2002·10 cites·12 claims
- 0634US6183611B1Method and apparatus for the disposal of processing fluid used to deposit and/or remove material on a substrateCUTEK RES INC·Filed 1998·Granted Feb 6, 2001·4 cites·16 claims
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