Assignee
CUTEK RESEARCH INC
US·5 granted patents·716 citations·filing 1997–1998
Top patents by PatentIndex Score
5 records- 0197US6077412ARotating anode for a wafer processing chamberCUTEK RESEARCH INC·Filed 1998·Granted Jun 20, 2000·192 cites·22 claims
- 0296US6017820AIntegrated vacuum and plating cluster systemCUTEK RESEARCH INC·Filed 1998·Granted Jan 25, 2000·282 cites·18 claims
- 0396US6017437AProcess chamber and method for depositing and/or removing material on a substrateCUTEK RESEARCH INC·Filed 1997·Granted Jan 25, 2000·178 cites·30 claims
- 0479US5997712ACopper replenishment technique for precision copper plating systemCUTEK RESEARCH INC·Filed 1998·Granted Dec 7, 1999·41 cites·24 claims
- 0559US6022465AApparatus and method utilizing an electrode adapter for customized contact placement on a waferCUTEK RESEARCH INC·Filed 1998·Granted Feb 8, 2000·23 cites·27 claims
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