Assignee
CVC INC
9 patents
Top patents by PatentIndex Score
US6124198ASep 26, 2000
Ultra high-speed chip interconnect using free-space dielectrics
CVC INC161 citations99
US6016000AJan 18, 2000
Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics
CVC INC290 citations99
US5846883ADec 8, 1998
Method for multi-zone high-density inductively-coupled plasma generation
CVC INC168 citations99
US6221217B1Apr 24, 2001
Physical vapor deposition system having reduced thickness backing plate
CVC INC55 citations96
US6108490AAug 22, 2000
Multizone illuminator for rapid thermal processing with improved spatial resolution
CVC INC52 citations96
US5876573AMar 2, 1999
High magnetic flux cathode apparatus and method for high productivity physical-vapor deposition
CVC INC61 citations96
US5871588AFeb 16, 1999
Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipment
CVC INC71 citations96
US6106148AAug 22, 2000
Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipment
CVC INC23 citations93
US6167195ADec 26, 2000
Multizone illuminator for rapid thermal processing with improved spatial resolution
CVC INC35 citations92