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CVC PRODUCTS INC
US48 patents
Top patents by PatentIndex Score
US6136165AOct 24, 2000
Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
CVC PRODUCTS INC169 citations99
US6692575B1Feb 17, 2004
Apparatus for supporting a substrate in a reaction chamber
CVC PRODUCTS INC565 citations98
US6444263B1Sep 3, 2002
Method of chemical-vapor deposition of a material
CVC PRODUCTS INC108 citations98
US6294836B1Sep 25, 2001
Semiconductor chip interconnect barrier material and fabrication method
CVC PRODUCTS INC131 citations98
US6203620B1Mar 20, 2001
Hermetically-sealed inductively-coupled plasma source structure and method of use
CVC PRODUCTS INC90 citations98
US6190732B1Feb 20, 2001
Method and system for dispensing process gas for fabricating a device on a substrate
CVC PRODUCTS INC126 citations98
US6132805AOct 17, 2000
Shutter for thin-film processing equipment
CVC PRODUCTS INC133 citations98
US6051113AApr 18, 2000
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing
CVC PRODUCTS INC141 citations98
US5976261ANov 2, 1999
Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment
CVC PRODUCTS INC155 citations98
US5937142AAug 10, 1999
Multi-zone illuminator for rapid thermal processing
CVC PRODUCTS INC471 citations98
US6905578B1Jun 14, 2005
Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
CVC PRODUCTS INC102 citations97
US6365502B1Apr 2, 2002
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC153 citations97
US6812126B1Nov 2, 2004
Method for fabricating a semiconductor chip interconnect
CVC PRODUCTS INC48 citations96
US6753272B1Jun 22, 2004
High-performance energy transfer method for thermal processing applications
CVC PRODUCTS INC58 citations96
US6245655B1Jun 12, 2001
Method for planarized deposition of a material
CVC PRODUCTS INC56 citations96
US6204204B1Mar 20, 2001
Method and apparatus for depositing tantalum-based thin films with organmetallic precursor
CVC PRODUCTS INC60 citations96
US6197166B1Mar 6, 2001
Method for inductively-coupled-plasma-enhanced ionized physical-vapor deposition
CVC PRODUCTS INC45 citations96
US6188044B1Feb 13, 2001
High-performance energy transfer system and method for thermal processing applications
CVC PRODUCTS INC54 citations96
US6073576AJun 13, 2000
Substrate edge seal and clamp for low-pressure processing equipment
CVC PRODUCTS INC51 citations96
US6048162AApr 11, 2000
Wafer handler for multi-station tool
CVC PRODUCTS INC56 citations96
US6004029ADec 21, 1999
Method for automated calibration of temperature sensors in rapid thermal processing equipment
CVC PRODUCTS INC44 citations96
US5775416AJul 7, 1998
Temperature controlled chuck for vacuum processing
CVC PRODUCTS INC84 citations96
US5715361AFeb 3, 1998
Rapid thermal processing high-performance multizone illuminator for wafer backside heating
CVC PRODUCTS INC80 citations96
US6705394B1Mar 16, 2004
Rapid cycle chuck for low-pressure processing
CVC PRODUCTS INC57 citations95
US6645847B2Nov 11, 2003
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC47 citations95
US6627995B2Sep 30, 2003
Microelectronic interconnect material with adhesion promotion layer and fabrication method
CVC PRODUCTS INC59 citations95
US6508197B1Jan 21, 2003
Apparatus for dispensing gas for fabricating substrates
CVC PRODUCTS INC70 citations95
US6274495B1Aug 14, 2001
Method for fabricating a device on a substrate
CVC PRODUCTS INC40 citations95
US6544341B1Apr 8, 2003
System for fabricating a device on a substrate with a process gas
CVC PRODUCTS INC41 citations94
US5630916AMay 20, 1997
Magnetic orienting device for thin film deposition and method of use
CVC PRODUCTS INC48 citations94
US6596133B1Jul 22, 2003
Method and system for physically-assisted chemical-vapor deposition
CVC PRODUCTS INC46 citations93
US6508885B1Jan 21, 2003
Edge sealing structure for substrate in low-pressure processing environment
CVC PRODUCTS INC41 citations93
US6461675B2Oct 8, 2002
Method for forming a copper film on a substrate
CVC PRODUCTS INC65 citations93
US6378600B1Apr 30, 2002
Thermally conductive chuck with thermally separated sealing structures
CVC PRODUCTS INC32 citations93
US6138745AOct 31, 2000
Two-stage sealing system for thermally conductive chuck
CVC PRODUCTS INC32 citations93
US5936829AAug 10, 1999
Thermally conductive chuck for vacuum processor
CVC PRODUCTS INC50 citations93
US6106682AAug 22, 2000
Thin-film processing electromagnet for low-skew magnetic orientation
CVC PRODUCTS INC18 citations92
US6042707AMar 28, 2000
Multiple-coil electromagnet for magnetically orienting thin films
CVC PRODUCTS INC22 citations92
US6039848AMar 21, 2000
Ultra-high vacuum apparatus and method for high productivity physical vapor deposition.
CVC PRODUCTS INC52 citations92
US5950723ASep 14, 1999
Method of regulating substrate temperature in a low pressure environment
CVC PRODUCTS INC28 citations92
US5248402ASep 28, 1993
Apple-shaped magnetron for sputtering system
CVC PRODUCTS INC46 citations91
US5746897AMay 5, 1998
High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition
CVC PRODUCTS INC39 citations90
US6444103B1Sep 3, 2002
Method and apparatus for thin film deposition using an active shutter
CVC PRODUCTS INC15 citations84
US6126790AOct 3, 2000
Method of magnetically orienting thin magnetic films with a multiple-coil electromagnet
CVC PRODUCTS INC8 citations73
US6235164B1May 22, 2001
Low-pressure processing system for magnetic orientation of thin magnetic film
CVC PRODUCTS INC13 citations72
US5902466AMay 11, 1999
Sputtering apparatus with magnetic orienting device for thin film deposition
CVC PRODUCTS INC9 citations72
US6373364B1Apr 16, 2002
Electromagnet for thin-film processing with winding pattern for reducing skew
CVC PRODUCTS INC10 citations65
US6475359B1Nov 5, 2002
Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation
CVC PRODUCTS INC1 citations51