Assignee
CYMER INC
US377 patents
Top patents by PatentIndex Score
US7196342B2Mar 27, 2007
Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
CYMER INC284 citations99
US6566667B1May 20, 2003
Plasma focus light source with improved pulse power system
CYMER INC185 citations99
US6567450B2May 20, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC265 citations99
US6549551B2Apr 15, 2003
Injection seeded laser with precise timing control
CYMER INC186 citations99
US6208675B1Mar 27, 2001
Blower assembly for a pulsed laser system incorporating ceramic bearings
CYMER INC193 citations99
US6208674B1Mar 27, 2001
Laser chamber with fully integrated electrode feedthrough main insulator
CYMER INC187 citations99
US6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US6104735AAug 15, 2000
Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly
CYMER INC167 citations99
US6067311AMay 23, 2000
Excimer laser with pulse multiplier
CYMER INC224 citations99
US6064072AMay 16, 2000
Plasma focus high energy photon source
CYMER INC190 citations99
US6051841AApr 18, 2000
Plasma focus high energy photon source
CYMER INC139 citations99
US6016325AJan 18, 2000
Magnetic modulator voltage and temperature timing compensation circuit
CYMER INC179 citations99
US5982800ANov 9, 1999
Narrow band excimer laser
CYMER INC122 citations99
US5978394ANov 2, 1999
Wavelength system for an excimer laser
CYMER INC223 citations99
US5970082AOct 19, 1999
Very narrow band laser
CYMER INC116 citations99
US5856991AJan 5, 1999
Very narrow band laser
CYMER INC198 citations99
US5852621ADec 22, 1998
Pulse laser with pulse energy trimmer
CYMER INC196 citations99
US5729562AMar 17, 1998
Pulse power generating circuit with energy recovery
CYMER INC241 citations99
US7491954B2Feb 17, 2009
Drive laser delivery systems for EUV light source
CYMER INC84 citations98
US7439530B2Oct 21, 2008
LPP EUV light source drive laser system
CYMER INC76 citations98
US7405416B2Jul 29, 2008
Method and apparatus for EUV plasma source target delivery
CYMER INC118 citations98
US6744060B2Jun 1, 2004
Pulse power system for extreme ultraviolet and x-ray sources
CYMER INC79 citations98
US6690704B2Feb 10, 2004
Control system for a two chamber gas discharge laser
CYMER INC128 citations98
US6625191B2Sep 23, 2003
Very narrow band, two chamber, high rep rate gas discharge laser system
CYMER INC236 citations98
US6538737B2Mar 25, 2003
High resolution etalon-grating spectrometer
CYMER INC109 citations98
US6535531B1Mar 18, 2003
Gas discharge laser with pulse multiplier
CYMER INC166 citations98
US6477193B2Nov 5, 2002
Extreme repetition rate gas discharge laser with improved blower motor
CYMER INC155 citations98
US6452199B1Sep 17, 2002
Plasma focus high energy photon source with blast shield
CYMER INC134 citations98
US6381257B1Apr 30, 2002
Very narrow band injection seeded F2 lithography laser
CYMER INC106 citations98
US6370174B1Apr 9, 2002
Injection seeded F2 lithography laser
CYMER INC99 citations98
US6240117B1May 29, 2001
Fluorine control system with fluorine monitor
CYMER INC205 citations98
US6094448AJul 25, 2000
Grating assembly with bi-directional bandwidth control
CYMER INC194 citations98
US6028879AFeb 22, 2000
Narrow band laser with etalon based output coupler
CYMER INC96 citations98
US6018537AJan 25, 2000
Reliable, modular, production quality narrow-band high rep rate F2 laser
CYMER INC280 citations98
US6014398AJan 11, 2000
Narrow band excimer laser with gas additive
CYMER INC106 citations98
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US5978409ANov 2, 1999
Line narrowing apparatus with high transparency prism beam expander
CYMER INC104 citations98
US5936988AAug 10, 1999
High pulse rate pulse power system
CYMER INC154 citations98
US5901163AMay 4, 1999
Narrow band laser with etalon based output coupler
CYMER INC91 citations98
US5852627ADec 22, 1998
Laser with line narrowing output coupler
CYMER INC95 citations98
US7872245B2Jan 18, 2011
Systems and methods for target material delivery in a laser produced plasma EUV light source
CYMER INC90 citations97
US7671349B2Mar 2, 2010
Laser produced plasma EUV light source
CYMER INC54 citations97
USRE40343EMay 27, 2008
Control circuit with automatic DC offset
CYMER INC55 citations97
US7372056B2May 13, 2008
LPP EUV plasma source material target delivery system
CYMER INC109 citations97
US7217940B2May 15, 2007
Collector for EUV light source
CYMER INC60 citations97
US7164144B2Jan 16, 2007
EUV light source
CYMER INC113 citations97
US7087914B2Aug 8, 2006
High repetition rate laser produced plasma EUV light source
CYMER INC109 citations97
US6972421B2Dec 6, 2005
Extreme ultraviolet light source
CYMER INC141 citations97
US6853653B2Feb 8, 2005
Laser spectral engineering for lithographic process
CYMER INC74 citations97
US6815700B2Nov 9, 2004
Plasma focus light source with improved pulse power system
CYMER INC113 citations97
Showing the top 50 of 377 patents by PatentIndex Score.