Assignee
DAMEN JOHANNES WILHELMUS
NL·3 granted patents·9 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0167US8130359B2Lithographic apparatus and a vacuum chamberDAMEN JOHANNES WILHELMUS·Filed 2009·Granted Mar 6, 2012·3 cites·20 claims
- 0266US8947638B2Actuation system and lithographic apparatusDAMEN JOHANNES WILHELMUS·Filed 2011·Granted Feb 3, 2015·2 cites·8 claims
- 0356US9112300B2Electrical connector for lithographic projection apparatusDAMEN JOHANNES WILHELMUS·Filed 2010·Granted Aug 18, 2015·4 cites·16 claims
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