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DAUB ERICH
DE2 patents
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US8133318B2Mar 13, 2012
Epitaxially coated silicon wafer with 110 orientation and method for producing it
DAUB ERICH2 citations50
US8460465B2Jun 11, 2013
Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally treated semiconductor wafer composed of monocrystalline silicon
DAUB ERICH0 citations35