Assignee
DAVID JEFFREY DRUE
US·22 granted patents·2 pending applications·124 citations·filing 2007–2013
Top patents by PatentIndex Score
24 records- 0196US8260446B2Spectrographic monitoring of a substrate during processing using index valuesDAVID JEFFREY DRUE·Filed 2010·Granted Sep 4, 2012·14 cites·7 claims
- 0294US8747189B2Method of controlling polishingDAVID JEFFREY DRUE·Filed 2011·Granted Jun 10, 2014·14 cites·19 claims
- 0393US8944884B2Fitting of optical model to measured spectrumDAVID JEFFREY DRUE·Filed 2013·Granted Feb 3, 2015·10 cites·20 claims
- 0493US8292693B2Using optical metrology for wafer to wafer feed back process controlDAVID JEFFREY DRUE·Filed 2009·Granted Oct 23, 2012·16 cites·24 claims
- 0592US8977379B2Endpoint method using peak location of spectra contour plots versus timeDAVID JEFFREY DRUE·Filed 2010·Granted Mar 10, 2015·8 cites·18 claims
- 0692US8834229B2Dynamically tracking spectrum features for endpoint detectionDAVID JEFFREY DRUE·Filed 2011·Granted Sep 16, 2014·9 cites·18 claims
- 0791US8535115B2Gathering spectra from multiple optical headsDAVID JEFFREY DRUE·Filed 2011·Granted Sep 17, 2013·8 cites·25 claims
- 0889US8814631B2Tracking spectrum features in two dimensions for endpoint detectionDAVID JEFFREY DRUE·Filed 2011·Granted Aug 26, 2014·13 cites·15 claims
- 0988US8202738B2Endpoint method using peak location of modified spectraDAVID JEFFREY DRUE·Filed 2011·Granted Jun 19, 2012·9 cites·20 claims
- 1082US9011202B2Fitting of optical model with diffraction effects to measured spectrumDAVID JEFFREY DRUE·Filed 2012·Granted Apr 21, 2015·4 cites·21 claims
- 1180US8679979B2Using optical metrology for within wafer feed forward process controlDAVID JEFFREY DRUE·Filed 2011·Granted Mar 25, 2014·3 cites·16 claims
- 1279US8666665B2Automatic initiation of reference spectra library generation for optical monitoringDAVID JEFFREY DRUE·Filed 2011·Granted Mar 4, 2014·3 cites·22 claims
- 1373US8930013B2Adaptively tracking spectrum features for endpoint detectionDAVID JEFFREY DRUE·Filed 2011·Granted Jan 6, 2015·3 cites·23 claims
- 1471US9289875B2Feed forward and feed-back techniques for in-situ process controlDAVID JEFFREY DRUE·Filed 2012·Granted Mar 22, 2016·2 cites·20 claims
- 1570US8751033B2Adaptive tracking spectrum features for endpoint detectionDAVID JEFFREY DRUE·Filed 2011·Granted Jun 10, 2014·2 cites·20 claims
- 1668US8554351B2Spectrographic monitoring of a substrate during processing using index valuesDAVID JEFFREY DRUE·Filed 2012·Granted Oct 8, 2013·1 cites·4 claims
- 1767US8892568B2Building a library of spectra for optical monitoringDAVID JEFFREY DRUE·Filed 2011·Granted Nov 18, 2014·2 cites·20 claims
- 1866US9233450B2Optical detection of metal layer clearanceDAVID JEFFREY DRUE·Filed 2012·Granted Jan 12, 2016·1 cites·18 claims
- 1964US8547538B2Construction of reference spectra with variations in environmental effectsDAVID JEFFREY DRUE·Filed 2011·Granted Oct 1, 2013·1 cites·20 claims
- 2061US8942842B2Varying optical coefficients to generate spectra for polishing controlDAVID JEFFREY DRUE·Filed 2011·Granted Jan 27, 2015·1 cites·22 claims
- 2160US8579675B2Methods of using optical metrology for feed back and feed forward process controlDAVID JEFFREY DRUE·Filed 2009·Granted Nov 12, 2013·0 cites·25 claims
- 2248US8392012B2Multiple libraries for spectrographic monitoring of zones of a substrate during processingDAVID JEFFREY DRUE·Filed 2008·Granted Mar 5, 2013·0 cites·9 claims
- 2346US2008138988A1Detection of clearance of polysilicon residueDAVID JEFFREY DRUE·Filed 2007·Application pending·0 cites
- 2440US2012278028A1Generating model based spectra library for polishingDAVID JEFFREY DRUE·Filed 2011·Application pending·0 cites
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