Assignee
DAVIS MATTHEW F
US3 patents
Top patents by PatentIndex Score
US8232212B2Jul 31, 2012
Within-sequence metrology based process tuning for adaptive self-aligned double patterning
DAVIS MATTHEW F8 citations82
US8274645B2Sep 25, 2012
Method and apparatus for in-situ metrology of a workpiece disposed in a vacuum processing chamber
DAVIS MATTHEW F2 citations61
US8089046B2Jan 3, 2012
Method and apparatus for calibrating mass flow controllers
DAVIS MATTHEW F3 citations57