Assignee
DE BOER GUIDO
NL12 patents
Top patents by PatentIndex Score
US9395635B2Jul 19, 2016
Position determination in a lithography system using a substrate having a partially reflective position mark
DE BOER GUIDO7 citations83
US8570055B2Oct 29, 2013
Capacitive sensing system
DE BOER GUIDO8 citations82
US9069265B2Jun 30, 2015
Interferometer module
DE BOER GUIDO4 citations80
US9036962B2May 19, 2015
Arrangement of optical fibers, and a method of forming such arrangement
DE BOER GUIDO5 citations79
US8638109B2Jan 28, 2014
Capacitive sensing system with differential pairs
DE BOER GUIDO4 citations79
US8705010B2Apr 22, 2014
Lithography system, method of clamping and wafer table
DE BOER GUIDO2 citations61
US8513959B2Aug 20, 2013
Integrated sensor system
DE BOER GUIDO1 citations60
US9261800B2Feb 16, 2016
Alignment of an interferometer module for use in an exposure tool
DE BOER GUIDO2 citations59
US9201315B2Dec 1, 2015
Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system
DE BOER GUIDO2 citations59
US8895943B2Nov 25, 2014
Lithography system and method of processing substrates in such a lithography system
DE BOER GUIDO0 citations51
US9678443B2Jun 13, 2017
Lithography system with differential interferometer module
DE BOER GUIDO0 citations48
US9395636B2Jul 19, 2016
Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer
DE BOER GUIDO0 citations48