Assignee
DE VRIES GOSSE CHARLES
NL·4 granted patents·4 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0173US9372413B2Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devicesDE VRIES GOSSE CHARLES·Filed 2012·Granted Jun 21, 2016·2 cites·20 claims
- 0263US8724081B2Lithographic apparatus and methodDE VRIES GOSSE CHARLES·Filed 2011·Granted May 13, 2014·1 cites·15 claims
- 0360US8634062B2Actuator system, lithographic apparatus, method of controlling the position of a component and device manufacturing methodDE VRIES GOSSE CHARLES·Filed 2009·Granted Jan 21, 2014·1 cites·15 claims
- 0441US8867021B2Illumination system, lithographic apparatus and method of adjusting an illumination modeDE VRIES GOSSE CHARLES·Filed 2010·Granted Oct 21, 2014·0 cites·19 claims
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