Assignee

DENIFL GUENTER

AT·1 granted patent·3 citations·filing 2012–2012

Technology mixB32B1 B44C1 C23C1 H01L1 H10P1 Y10T1

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0168US9511560B2Processing a sacrificial material during manufacture of a microfabricated productDENIFL GUENTER·Filed 2012·Granted Dec 6, 2016·3 cites·16 claims

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