Assignee
DHANDAPANI SIVAKUMAR
US·3 granted patents·30 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0195US9138860B2Closed-loop control for improved polishing pad profilesDHANDAPANI SIVAKUMAR·Filed 2011·Granted Sep 22, 2015·23 cites·20 claims
- 0271US8758085B2Method for compensation of variability in chemical mechanical polishing consumablesDHANDAPANI SIVAKUMAR·Filed 2011·Granted Jun 24, 2014·3 cites·13 claims
- 0370US8337279B2Closed-loop control for effective pad conditioningDHANDAPANI SIVAKUMAR·Filed 2009·Granted Dec 25, 2012·4 cites·20 claims
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