Assignee
DMITRIEV VLADIMIR
IL5 patents
Top patents by PatentIndex Score
US9658527B2May 23, 2017
Correction of errors of a photolithographic mask using a joint optimization process
DMITRIEV VLADIMIR14 citations83
US9753366B2Sep 5, 2017
Method and apparatus for the determination of laser correcting tool parameters
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Analyses of measurement data
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US9606444B2Mar 28, 2017
Method and apparatus for locally deforming an optical element for photolithography
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US8869076B2Oct 21, 2014
Global landmark method for critical dimension uniformity reconstruction
DMITRIEV VLADIMIR0 citations38