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DOBASHI KAZUYA

JP3 patents

Top patents by PatentIndex Score

US9099298B2Aug 4, 2015

Substrate cleaning apparatus and substrate cleaning method

DOBASHI KAZUYA6 citations70

US9214364B2Dec 15, 2015

Substrate cleaning apparatus and vacuum processing system

DOBASHI KAZUYA3 citations57

US8268185B2Sep 18, 2012

Method for analyzing quartz member

DOBASHI KAZUYA0 citations45