Assignee
DONDERS SJOERD NICOLAAS LAMBERTUS
NL·5 granted patents·21 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0185US8610089B2Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2012·Granted Dec 17, 2013·13 cites·19 claims
- 0283US8848165B2Lithographic apparatus and device manufacturing methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2012·Granted Sep 30, 2014·2 cites·20 claims
- 0375US8976333B2Lithographic apparatus and lithographic apparatus cooling methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2011·Granted Mar 10, 2015·2 cites·7 claims
- 0475US8120749B2Lithographic apparatus and device manufacturing methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2008·Granted Feb 21, 2012·2 cites·12 claims
- 0569US8149379B2Lithographic apparatus and device manufacturing methodDONDERS SJOERD NICOLAAS LAMBERTUS·Filed 2008·Granted Apr 3, 2012·2 cites·19 claims
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